Nanofabrication Center

Our mission is to support the fabrication, synthesis, and characterization of nanoscale devices and materials for both academic and industrial users. We are also charged with providing hands-on training in nanotechnology processes to all qualified users.

The Nanofabrication Center is part of the National Nanotechnology Infrastructure Network (NNIN), a group of fourteen nanotechnology labs located around the country and supported by the National Science Foundation (NSF). These labs represent part of the NSF’s substantial investment in nanotechnology research and training.

The NFC consists of a 3000 sq ft Class 10 clean room, and an additional 4000 sq ft of labs and support areas. The Center has $20 million of equipment in place and operational for:

- Optical and electron beam lithography
- Thin film deposition
- Metallization and sputtering
- Annealing, oxidation, and doping
- Wet etching and reactive ion etching
- Optical pattern (mask) development

The NFC is designed to be an open facility available to a wide range of users, including external academic and industrial researchers. Once users have completed a basic lab safety training course and are approved to operate individual tools, they may access the NFC 24 hours a day, seven days a week, subject to any periodic closures of the cleanroom for maintainance, or Keller Hall.