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Content tagged with: Block copolymers and Thin films
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Hierarchical Metal Oxide Films

Feb. 2010- NSF Center for Hierarchical Manufacturing (CHM), University of Massachusetts Amherst Patterned metal oxide films having well-defined order and morphology are essential device layers in microelectronics, photovoltaics, and microfluidics for separations and sensors.  In a typical fabrication process sequence, a planar metal oxide film is deposited, coated with multi-layer resist structures, ...


A Simple Route to Highly Oriented and Ordered Nanoporous Block Copolymer Templates

Controlling the orientation and lateral ordering of the block copolymer microdomains is essential to their use as templates and scaffolds for the fabrication of nanostructured materials. In addition, a process must be robust, simple to implement, and rapid, and should not introduce disruptive processing steps that would impede their use. Here, we describe thin films of ...

A Simple Top-Down/Bottom-Up Approach to Sectored, Ordered Arrays of Nanoscopic Elements Using Block Copolymers

A top-down/bottom-up approach is demonstrated by combining electron-beam (e-beam) lithography and a solvent annealing process. Micellar arrays of polystyrene-block-poly(4-vinylpyridine) (PS-b-P4VP) with a high degree of lateral order can be produced on a surface where sectoring is defined by e-beam patterning. The e-beam is used to crosslink the block copolymer (BCP) film immediately after ...

Accessibility of cylindrical channels within patterned mesoporous silica films using nanoparticle diffusion

Mesoporous silica films with well ordered nanochannels (approximately 7 nm in diameter) oriented parallel to the substrate were synthesized using supercritical carbon dioxide mediated silica deposition within templates comprised of triblock copolymers blended with strongly associating homopolymers. The films were patterned at the device level by conventional lithography and etched to yield ...

An Efficient Route to Mesoporous Silica Films with Perpendicular Nanochannels

Mesoporous silica films with cylindrical pores oriented normal to the substrate are prepared by selective deposition of silica within the poly(hydroxy styrene) domains of poly(-methyl styrene-b- hydroxy styrene) template films using supercritical carbon dioxide as a delivery medium. Atomic force microscopy, electron microscopy, and grazing incidence small angle X-ray scattering (see figure) ...

Directed Self-Assembly of Block Copolymers for Nanolithography: Fabrication of Isolated Features and Essential Integrated Circuit Geometries

Self-assembling block copolymers are of interest for nanomanufacturing due to the ability to realize sub-100 nm dimensions, thermodynamic control over the size and uniformity and density of features, and inexpensive processing. The insertion point of these materials in the production of integrated circuits, however, is often conceptualized in the short term for niche applications using the dense ...

Dual-Tone Patterned Mesoporous Silicate Films Templated From Chemically Amplified Block Copolymers

Directly patterned mesoporous silicate films are prepared using positive- and negative-tone strategies by performing phase selective silica condensation within lithographically exposed poly(styrene-b-tert-butyl acrylate) (PS-b-PtbA) templates containing photoacid generators. The use of supercritical fluid as a process medium enables rapid diffusion of the silicate precursor within the ...

Fabrication of Highly Ordered Silicon Oxide Dots and Stripes from Block Copolymer Thin Films

A general route to fabricate highly ordered arrays of nanoscopic silicon oxide dots and stripes (see figure) from block copolymer thin films is described. Poly(styrene-b-4-vinylpyridine) thin films with cylindrical microdomains oriented normal and parallel to the surface were used as templates for the fabrication of nanoscopic silicon oxide, with polydimethylsiloxane as the inorganic precursor.

Fabrication of Ordered Mesoporous Silica Films with Encapsulated Iron Oxide Nanoparticles using Ferritin-Doped Block Copolymer Templates

Ordered mesoporous silica glasses containing encapsulated magnetic nanoparticles were fabricated by the 3D replication of preorganized block copolymer templates doped with ferritin. Solutions of Pluronic F127 (PEO105-PPO70-PEO105) containing horse spleen ferritin and p-toluene sulfonic acid were spin-coated onto silicon test wafers. Phase selective deposition of silica within the ...

Influence of Interfacial Energy on Electric-Field-Induced Sphere-to-Cylinder Transition in Block Copolymer Thin Films

The effect of the interfacial energy on the electric-field-induced sphere-to-cylinder (S-to-C) transition in polystyrene-b-poly(methyl methacrylate) (PS-b-PMMA) copolymer thin films was studied as a function of the difference in the interfacial interactions of the PS and PMMA blocks with the substrate, ?. It was found that the interfacial energies altered both the critical electric field strength ...

Ion-Complexation-Induced Changes in the Interaction Parameter and the Chain Conformation of PS-b-PMMA Copolymers

Small-angle neutron scattering (SANS) was used to study the changes of segmental interactions and chain conformation due to the formation of lithium?PMMA complexes in polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA) copolymers as a function of temperature and the percentage of carbonyl groups coordinated with lithium ions. ?effc and statistical segmental length, ?, are derived from the ...

Macroscopic Arrays of Block Copolymers with Areal Densities of 10 Terbit/inch2 and Beyond

BCP self-assemble into a range of highly-ordered morphologies and by controlling the orientation and lateral ordering of the nanoscopic microdomains, numerous applications will emerge. By combining the bottom-up self-assembly of BCPs with top-down micro-fabrication processes faster, better and cheaper devices can be generated in very simple, yet robust, ways. By combining confinement effects ...

Phase transition behavior in thin films of block copolymers by use of immiscible solvent vapors

The phase transitions in thin films of a block copolymer, BCP, that forms micelles when exposed to immiscible solvent vapors, were investigated at two different temperatures. Pre-swelling with a nonvolatile solvent was used to prevent dewetting prior to the addition of a volatile solvent used to affect the annealing. The temperature and, therefore, the vapor pressure of the solvent were varied, ...

Simple Fabrication of Micropatterned Mesoporous Silica Films Using Photoacid Generators in Block Copolymers

Mesoporous metal oxide films have been the subject of extensive research because of their potential utility in sensors,(1)a microfluidics,(1)b microelectronics, optoelectronics, microelectromechanical systems,(1)c and catalysis.(1)d Many of these applications require the patterning of the mesoporous device layers to integrate other components necessary for intended applications. Patterning of ...


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Oregon Nanoscience and Microtechnologies Institute

Oregon Nanoscience and Microtechnologies Institute

Oregon Signature Research Center
ONAMI is Oregon’s first ‘Signature Research Center’ and a multi-level collaboration among Oregon’s research universities, Pacific Northwest National Laboratory and industry in the “Silicon Forest” high-tech cluster that is home to the world’s leading semiconductor, MEMS, nanotechnology tools and ...


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James J. Watkins

James J. Watkins

NSF Center for Hierarchical Manufacturing
University of Massachusetts, Amherst

Ammar Jangbarwala

Ammar Jangbarwala

Catalyx Nanotech Inc

Jin Ho Kim

Jin Ho Kim

Brown University


Fabrication of a nanoporous template from a diblock copolymer film - electric field alignment

Fabrication of a nanoporous template from a diblock copolymer film - electric field alignment

An applied electric field aligns a cylindrical-phase diblock copolymer perpendicular to a substrate. One polymer block is removed by UV exposure and a chemical rinse to yield a nanoporous polymer film. The porous film can be used as a template for electrodeposition of metal nanowires or as a mask for reactive ion etching.

Fabrication of a nanoporous template from a diblock copolymer film - neutral brush

Fabrication of a nanoporous template from a diblock copolymer film - neutral brush

A perpendicular orientation of cylindrical microdomains in diblock copolymer thin films is achieved by control over polymer-surface interactions. The block which forms cylindrical microdomains is removed by UV exposure and a chemical rinse to yield a nanoporous polymer film. The porous film can be used as a template for electrodeposition of metal nanodots or as a mask for reactive ion etching.

Fabrication of a nanoporous template from a diblock copolymer film - solvent annealing

Fabrication of a nanoporous template from a diblock copolymer film - solvent annealing

An evaporation-induced flow in solvent cast block copolymer films can produce arrays of nanoscopic cylinders oriented normal to the surface and solvent annealing could markedly enhance the ordering of block copolymer microdomains in thin films. Without removing minor components, solvent-induced surface reconstruction can produce nanoporous structure in thin films. The porous film can be used as ...