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Frontiers of Characterization and Metrology for Nanoelectronics

Conference
Monday, March 25, 2013 - 1:00am to Thursday, March 28, 2013 - 1:00am

The 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (formerly titled Characterization and Metrology for ULSI Technology) will be held March 25-28, 2013 at the National Institute of Standards and Technology (NIST), Gaithersburg, Maryland, USA. This conference, the ninth in the series, will focus on the frontiers and innovation in characterization and metrology of nanoelectronics.

The conference is sponsored by the National Institute of Standards and Technology, College of Nanoscale Science and Engineering, CEA-LETI, Semiconductor Research Corporation (SRC), International SEMATECH Manufacturing Initiative (ISMI), AVS, National Science Foundation (NSF), American Physical Society (APS), and IEEE/Electron Devices Society