Center for Nanoscale Chemical Electrical Mechanical Manufacturing Systems: Researchers at the University of Illinois Urbana-Champaign use a novel dry-etching process to achieve a resolution of 80nm and an etch rate of 5 Å/s. This direct technique for nanopatterning metals has great potential for nanoscale device fabrication.

Schultz PL, et al. "Solid-state electrochemical nanoimprinting of copper" JVST B 2007 25(6) 2419-2424