University of Massachusetts Amherst
The Center for Hierarchical Manufacturing is an NSF Nanoscale Science and Engineering Center (NSEC). The mission of The Center for Hierarchical Manufacturing (CHM) at the University of Massachusetts is to be a leading research and education center for the development of efficient, cost effective process platforms and versatile tools for the two and three dimensional integration of components and systems across multiple length scales. The approach integrates nanofabrication processes for sub-30 nm elements based on directed self-assembly, additive-driven assembly, nanoimprint lithography, high fidelity 3-D polymer template replication, and conformal deposition at the nanoscale with Si wafer technologies or high-rate roll-to-roll (R2R) based production tools to yield materials and devices with unprecedented performance for computing, energy conversion and human health. The CHM effort is made comprehensive by research on device design, modeling and prototype testing in functional architectures that takes advantage of the specific hierarchical nanomanufacturing capabilities developed by the Center.
Center Research
Center Highlights
