The FabLab is a Class 1000 research cleanroom located in the Jeong H. Kim Engineering Building. The lab supports research and development programs in nano science and technology, micro-electromechanical systems, semiconductors, materials and devices for electronics, bioscience and bioengineering, and sensor/actuator systems. FabLab is open to users from across the university community. We also strongly encourage users from area companies, other universities and government labs to take advantage of our cutting edge facility and equipment. All are welcome.
There are three separate clean rooms in FabLab covering a total area of approximately 10,000 square feet. The largest and cleanest lab is the Research Clean Room, a 6,600 square foot, Class 1000 laboratory. The rest of the lab space is divided among:
- the Teaching lab, where senior-level undergraduate and graduate students learn to process and test electronic devices (ENEE 416) or microelectromechanical (MEMs) devices. The lab classes are taught by FabLab staff.
- the Exploratory lab for non-traditional materials and devices.
- and the SEM room where our Direct Write Electron Beam system is located.
There is also a Process Support level below the research Clean Room. This level contains all of the support equipment needed for maintaining the clean rooms and is where we store our chemicals, gases and clean room supplies. All of our Backside Equipment (Chemical Mechanical polishing, Wafer Dicing Saw and Wire Bonder).