Ion induced deposition
use of a focused, concentrated stream of ions to bring about or give rise to the localized reaction of an adsorbed molecule to deposit material [SOURCE: ISO/TS 80004-8 v1, 7.1.12]
use of a focused, concentrated stream of ions to bring about or give rise to the localized reaction of an adsorbed molecule to deposit material [SOURCE: ISO/TS 80004-8 v1, 7.1.12]
This project is supported by the National Science Foundation CMMI-1025020
Center for Hierarchical Manufacturing