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micro actuators

Technology Integration and Advanced Nano/microsystems Lab
Technology Integration and Advanced Nano/microsystems Lab
111 Church St S.E. Minneapolis, MN 55455 USA

TIAN laboratory is currently focused on Micro/Nano Electro Mechanical Systems (MEMS/NEMS). Long-term research aims to investigate the fundamental electrical and mechanical principles of new materials for MEMS/NEMS and low-cost micro/nanomanufacturing approaches, utilizing nanotechnology (“bottom-up” nanomanufaturing techniques, nanomaterials, etc.) to effectively enhance the performance of micro/nanosystems. Present research efforts are the combination of “bottom-up” nano self-assembly and “top-down” hot embossing and other new MEMS fabrication technologies.