A premier research laboratory in the College of Engineering, the Carnegie Mellon Nanofabrication Facility is one of the most well equipped university based facilities for thin film and nano/micro device development in the United States. The Nanofab includes a cleanroom with 2,600 square feet of class 100 space and 1,200 square feet of class 10 space, as well as three thin film labs.
Reactive Ion Etch (RIE)
Carnegie Mellon Nanofab
ECE Department Pittsburgh, PA 15213 USA