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Center for Nano and Microcontamination Control

Center for Nano and Microcontamination Control

The Center for Nano and Microcontamination Control addresses particulate and chemical contamination and defects that directly affect semiconductor fabrication, where aggressive miniaturization will reduce feature sizes to less than 35 nm in the next 5-10 years. The Center's goal is to develop state of the art techniques for micro and nanoscale contaminant control, mitigation, removal and characterization in manufacturing and fabrication processes.

Center for Nano and Microcontamination Control
Northeastern University
Egan Research Center
360 Huntington Ave.
Boston, MA
02115
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http://www.cmc.neu.edu/
617-373-6012

Type: 
Academic