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Atomic layer deposition (ALD)

process of fabricating uniform conformal films through the cyclic deposition of material through self-terminating surface reactions that enable thickness control at the atomic scale [SOURCE: ISO/TS 80004-8 v1, 7.2.2]

Oregon Nanoscience and Microtechnologies Institute
Oregon Nanoscience and Microtechnologies Institute
P.O. Box 2041 Corvalis, OR 97339 USA

ONAMI is Oregon’s first ‘Signature Research Center’ and a multi-level collaboration among Oregon’s research universities, Pacific Northwest National Laboratory and industry in the “Silicon Forest” high-tech cluster that is home to the world’s leading semiconductor, MEMS, nanotechnology tools and quantum dot industrial sites.