Isotropic etching
process (usually wet) in which etch rate in the horizontal and vertical directions are identical [SOURCE: ISO/TS 80004-8 v1, 7.3.14]
process (usually wet) in which etch rate in the horizontal and vertical directions are identical [SOURCE: ISO/TS 80004-8 v1, 7.3.14]
This project is supported by the National Science Foundation CMMI-1025020
Center for Hierarchical Manufacturing