Plasma Enhanced Chemical Vapor Deposition

Plasma-Therm is a U.S. based manufacturer of etch and thin film deposition equipment for a number of global compound semiconductor and related specialty markets. For more than 35 years, we have enabled various process technologies by coupling reliable platforms with award-winning service. We hold over 37 patents for innovation in plasma process technologies.

Plasma Dynamics, LLC is involved in the plasma processing of advanced materials by reactive ion etching (RIE) and plasma enhanced chemical vapor deposition (PECVD). Founded in 2003 and located in Wilmington, MA, company services include R&D, process development, as well as low level production. Clients include large and small companies in the biotech, photonics, failure analysis, and electronics fields as well as colleges and universities.

Amtech Systems, Inc., through its subsidiaries, engages in the design, assembly, sale, and installation of capital equipment and related consumables used in the manufacture of wafers, primarily for the solar and semiconductor industries.