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UV lithography

EV Group
EV Group
DI Erich Thallner Strasse 1 4782 St.Florian am Inn AUSTRIA

Our vision of "being the first in exploring new techniques and serving next generation applications of micro and nano fabrication technologies" enables our customers to successfully commercialize their new product-ideas. This ensures continuous effective development and economic stability.

The basis for our success is our products: lithography, bonding and imprint systems. We hold the dominant share of the market for all types of wafer bonding equipment and are the market and technology leader in lithography and nanoimprinting.

Heidelberg Instruments Inc.
Heidelberg Instruments Inc.
2539 W 237th St Suite A Torrance, CA 90505 United States

With an installation base of over 850 systems worldwide, Heidelberg Instruments is a world leader in the production of high-precision photolithography systems and maskless aligners.  Due to their flexibility, these systems are used in research, development and industrial applications for direct writing and photomask production by some of the most prestigious universities and industry leaders. Applications include MEMS, BioMEMS, nanotechnology, ASICS, TFT, plasma displays, micro optics and others.