TSOM allows a user to analyze samples from multiple image planes along the focus direction, instead of the typical analysis from a single plane. It collects 2-D images at different focal positions from a conventional bright field optical microscope, extracts brightness profiles from these multiple out-of-focus images, and uses the differences between them to construct the TSOM image.
TSOM has a range of potential applications, from defect analysis and inspection and process control to photomask metrology, nanoparticle metrology, film thickness metrology, and more.
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