MEMS

With an installation base of over 850 systems worldwide, Heidelberg Instruments is a world leader in the production of high-precision photolithography systems and maskless aligners.  Due to their flexibility, these systems are used in research, development and industrial applications for direct writing and photomask production by some of the most prestigious universities and industry leaders. Applications include MEMS, BioMEMS, nanotechnology, ASICS, TFT, plasma displays, micro optics and others.

Founded in 1984, Heidelberg Instruments is today a global leader in design, development and manufacturing of complex laser based maskless lithography systems. These systems are critical to fabrication of advanced photomasks and direct write solutions in the areas of Advanced Electronic Packaging, Flat Panel Display, MEMS, Integrated Optics and other micro and nano based applications.

TIAN laboratory is currently focused on Micro/Nano Electro Mechanical Systems (MEMS/NEMS). Long-term research aims to investigate the fundamental electrical and mechanical principles of new materials for MEMS/NEMS and low-cost micro/nanomanufacturing approaches, utilizing nanotechnology (“bottom-up” nanomanufaturing techniques, nanomaterials, etc.) to effectively enhance the performance of micro/nanosystems. Present research efforts are the combination of “bottom-up” nano self-assembly and “top-down” hot embossing and other new MEMS fabrication technologies.

Innovative Organics is an industry leader in the development of environmentally friendly, biodegradable coolants, lubricants, abrasive slurries, cleaners and specialty fluids for use in a wide variety of industries.

imt, Inc. is a leading MEMS contract manufacturing and foundry partner that combines cooperative design services with a unique mix of experience in prototyping, process development, high-volume manufacturing, metrology and test capabilities to serve a diverse range of customer applications

Hyphenated-Systems develops and manufactures advanced hybrid microscopy solutions for research and industrial applications in macro/micro, micro and micro/nano technologies.

FUJIFILM Dimatix, Inc., a wholly owned subsidiary of FUJIFILM Corporation, is the world's premier provider of piezoelectric ink jet printheads.

Enable IPC Corporation develops and commercializes rechargeable batteries for use in low power applications.

Abeam Technologies is a company with expertise in microelectronic technology, software development, optics, and electronics. We develop simulation software used in maskmaking and microelectronic industry, fabricate nano-patterns, and are also involved in a variety of projects.