Maskless

With an installation base of over 850 systems worldwide, Heidelberg Instruments is a world leader in the production of high-precision photolithography systems and maskless aligners.  Due to their flexibility, these systems are used in research, development and industrial applications for direct writing and photomask production by some of the most prestigious universities and industry leaders. Applications include MEMS, BioMEMS, nanotechnology, ASICS, TFT, plasma displays, micro optics and others.

Lumarray is a lithography company with a state-of-the-art-patented technology. Our technology, Zone-Plate-Array Lithography (ZPAL), integrates recent advances in microfabrication, micromechanics and fast computing to produce a lithography tool that will handle the lithographic needs of the decades to come.