The George J. Kostas Nanoscale Technology and Manufacturing Research Center is the primary facility for micro and nanofabrication at Northeastern University. Established through Mr. George J. Kostas '43 generous gift, The facility was completed in January 2005.
The Kostas facility also serves as the main facility for the new NSF Nanoscale Science and Engineering Center for High-rate Nanomanufacturing (CHN) at Northeastern University, in partnership with the University of Massachusetts Lowell , and the University of New Hampshire . The facility is open to faculty, students, researchers, coop students, and external users. The facility provides support and materials based on user fees and has capabilities for processing 3,4, and 6 inch wafers as well as smaller parts. The center consists of three areas.
The first area consists of 5000 square feet of class 10, 1000, and 10000 cleanroom space and includes capabilities for optical lithography, nanolithography, thin film deposition, furnace processes, wet chemical processes, megasonic and ultrasonic cleaning, ICP plasma etching, ion milling, and characterization, including surface topography, thin film characterization, optical microscopy, wire bonding, and particle characterization. The second area includes non-cleanroom lab space with hoods, device testing areas with a full range of electrical test instruments, design areas, and an imaging lab with capabilities in FESEM, e-beam writing, EDX, SPM, nanomanipulators, surface profilometry, and surface energy analysis.
The third area is dedicated to undergraduate and graduate student teams working on projects with corporate partners.
George J. Kostas Nanoscale Technology and Manufacturing Research Center
464a Egan Bldg.
360 Huntington Ave
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